About: http://webisa.webdatacommons.org/324831253

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For this reason, there is a problem that resolution is fatally influenced since the photoresist pattern is thickly formed in the trench region, as in FIG. 1(c).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com