About: http://webisa.webdatacommons.org/325136307

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Polysilicon used for the gate electrodes 6 and 13 generates tensile stress due to introduction of a p- or n-type dopant such as phosphorus (P) or arsenic (As) .
http://www.w3.org/ns/prov#wasQuotedFrom	google.es