About: http://webisa.webdatacommons.org/325890123

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 12 is a top plan view showing a variable capacitor using a MEMS device according to a fourth embodiment of the present invention;
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com