| http://www.w3.org/ns/prov#value | - Silicon oxide, silicon nitride, and silicon oxynitride can be used as the insulating material containing silicon, and materials such as polyimide, polyamide, acrylic, and BCB (benzocyclobutene) can be used as the organic resin. [0317] A silicon oxynitride film is formed by plasma CVD in Embodiment 5.
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