About: http://webisa.webdatacommons.org/326052460

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http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a side cross-sectional view of the semiconductor substrate of FIG. 3 following methods of barrier and metal layer deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com