About: http://webisa.webdatacommons.org/32606995

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 2C, insulating material such as silicon dioxide is deposited by LPCVD, for example, to cover the substrate 60 and the gate 62.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com