About: http://webisa.webdatacommons.org/326081204

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 21A is a flow chart which shows a dual exposure process in accordance with this invention which is a modification of FIG. 20A in which the nanostep is deferred until after a first exposure of the entire workpiece.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au