| http://www.w3.org/ns/prov#value | - As described above, the selective growth mask 13 is preferably made up of a plurality of individual stripes 13 a to 13 e), as shown in FIG. 1A. In this case, the width (Ws) of each stripe mask is preferably 0.5 to 100 ??m, more preferably 1 to 50 ??m, still more preferably 5 to 20 ??m, and especially preferably 5 to 15 ??m.
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