About: http://webisa.webdatacommons.org/326253690

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 2R, a second interlayer insulating film 64 is formed by depositing an insulating film such as BPSG on the first interlayer insulating film 61.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com