About: http://webisa.webdatacommons.org/326281574

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the first interlayer insulating film 20, an insulating film including silicon is formed to have a thickness of 100 nm to 200 nm by plasma CVD or sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com