About: http://webisa.webdatacommons.org/326382698

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A process according to claim 4, wherein the reacting gas is a mixture of at least one of CF4 and CHF3, and H2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com