About: http://webisa.webdatacommons.org/326454970

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, the present invention is a technique that maps a matrix of integrated circuits formed on a semiconductor wafer substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com