About: http://webisa.webdatacommons.org/326545736

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The holes in the ILD layer 2002 are filled with a suitable conductive material, such as tungsten, to form the various contacts.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com