About: http://webisa.webdatacommons.org/326606094

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The second interlayer insulating film 321 can be formed using an insulating substance such as silicon oxide or silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au