About: http://webisa.webdatacommons.org/326707821

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	That other feature can be, for example, the wafer's characteristic ???flat??? or ???notch.??? As well, it can be an alignment mark or other pattern etched or otherwise extent, e.g., on the surface of the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de