About: http://webisa.webdatacommons.org/326929471

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The CPB-optical system directs the beam to the substrate, which usually is a semiconductor wafer coated with a suitable resist.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com