About: http://webisa.webdatacommons.org/32698745

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Method according to claim 3, wherein the outer insulating layer is a material selected from the group consisting of aluminum oxide (Al2 O3), phosphorous glass (SiO2.P2 O5), boron glass (SiO2.B2 O3) and silicon nitride (Si3 N4).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com