About: http://webisa.webdatacommons.org/327064382

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This arrangement is effective particularly in a case where the vias are made of an easily corrodible material such as copper and it is undesirable to expose the vias in the surface of the semiconductor wafer 1.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com