About: http://webisa.webdatacommons.org/327209741

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first substrate is bonded with a second substrate via an insulating layer such as an oxide film, and then the underside of the first substrate is ground or polished in advance so as to reduce its thickness.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es