About: http://webisa.webdatacommons.org/327392385

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The hard mask is often made of a suitable material such as silicon dioxide, silicon nitride, combinations of these, and others.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com