About: http://webisa.webdatacommons.org/327529347

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The material used to form the protective layer 318 integrated with the spacers 316 may be loaded with silica or other particles, with dimensions in the range of 10 nm to 10 ??m to increase hardness, if desired.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com