About: http://webisa.webdatacommons.org/327924420

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Various objects can be dried using the processes of the present invention such as semiconductor wafers, substrates, and other media requiring photoresist drying.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com