About: http://webisa.webdatacommons.org/328076999

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	manufacture including wafer oxidation, film deposition, ion implantation, and etching and process parameters of those steps (e.g., film thickness, the degree of ion doping, and etching depth).
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com