About: http://webisa.webdatacommons.org/328166926

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, the fluid is a liquid, such as substantially pure de-ionized water or an aqueous solution of potassium hydroxide, which does not interfere with the polishing operation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com