About: http://webisa.webdatacommons.org/32842622

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to further advantageous embodiments of the invention, the contact surface is formed such that the mutual spacing between adjacent front surfaces is less than 10 ??m, in particular less than 5 ??m (e.g. 4 ??m or less).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com