About: http://webisa.webdatacommons.org/328657429

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, the accumulation of surface charges and/or their subsequent neutralization can alter surface chemistries or other material properties, and thereby negatively effect optical, mechanical, and/or other properties of MEMS devices.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com