About: http://webisa.webdatacommons.org/328742837

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Most films employed in the semiconductor process can be used to block an ion beam, including SiO2, silicon nitride, aluminum, and other thin metal films.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com