About: http://webisa.webdatacommons.org/328921599

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	So, the maximum concentration point of oxygen may lie at some distance, for example 20???40 ??? from the surface of the original amorphous silicon layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es