About: http://webisa.webdatacommons.org/328962449

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For the target object 11, Si, GaAs have been used, but other semiconductor materials, insulators such as glass, quartz, and metals may also be processed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com