About: http://webisa.webdatacommons.org/32907461

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Layer 140 may include another dielectric material, such as a silicon oxynitride, that may be deposited or thermally grown on layer 130.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com