About: http://webisa.webdatacommons.org/329119659

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Substrate aperture 74 is circular, but could also have a square, rectangular, oval or other geometry.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com