| http://www.w3.org/ns/prov#value | - Furthermore, even in the case where one kind or a plurality of kinds of elements selected from the group consisting of H, H2, O, O2, P, and H2O, in addition to a rare gas element, one kind or a plurality of kinds of elements selected from the group consisting of H, H2, O, O2, P, and H2O is added to the base insulating film as well as the substrate.
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