About: http://webisa.webdatacommons.org/329229848

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such a change in rotation may, in some cases, be conducted during a processing step such as during a depositing, etching, cleaning, or drying process of the microelectronic topography.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com