About: http://webisa.webdatacommons.org/329438380

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	LED Automation Software: Understanding the Process Through Data is an Important First Step
http://www.w3.org/ns/prov#wasQuotedFrom	appliedmaterials.com