About: http://webisa.webdatacommons.org/329489837

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	d) decomposing the precursor on the IC surface to deposit, by chemical vapor deposition (CVD), an alloy film including the metal selected from the group consisting of Zr and Hf, the doping metal, and oxygen; and
http://www.w3.org/ns/prov#wasQuotedFrom	google.com