About: http://webisa.webdatacommons.org/329539667

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	C. by low pressure chemical vapor deposition (LPCVD) to a desired thickness, for example 5000 Angstrom, which is half a micrometer (0.5 um).
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr