About: http://webisa.webdatacommons.org/329610817

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A first insulation layer 103, typically made of oxide such as silicon oxide, is formed on the upper surface of the semiconductor substrate 100.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com