About: http://webisa.webdatacommons.org/329749121

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After deposition, the dielectric materials need to be able to withstand processing steps, such as high temperature anneal, etch, and cleaning steps.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com