About: http://webisa.webdatacommons.org/329799138

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After the second features are deposited on substrate 602, substrate 602 can be optionally cured at curing station 954 by heat, ultraviolet light, electron beam, infrared, microwave, laser, and other such curing systems and methods.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk