About: http://webisa.webdatacommons.org/329828890

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the amorphous film 103 is made of an insulating material such as silicon dioxide, it must be removed at this point; but if it is made of a conductive material such as tungsten or tungsten silicide, there is no need to remove it.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com