About: http://webisa.webdatacommons.org/329875867

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this manner, an insulating film including three layers of SiON, SiNx, and SiON is formed over the TFT, however, the structure and material are not limited to these.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com