About: http://webisa.webdatacommons.org/329925787

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In embodiments of the invention, the base substrate can be formed from a wide variety of materials such as glass, silicon, silicon nitride, aluminum oxide or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com