About: http://webisa.webdatacommons.org/330084299

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the case of multilayer systems 4 on the basis of molybdenum and silicon, for example, the stress-reducing layer 5 is particularly preferably composed of molybdenum.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com