PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • In turn, a metal film such as of Al is formed on the entire surface of the transparent orientation film 8 including the openings, and patterned by photolithographic and etching processes to form electrode pads 33b and 33c for stereo-interconnections.
http://www.w3.org/ns/prov#wasQuotedFrom
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