About: http://webisa.webdatacommons.org/330243030

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, chambers for other types of processing such as sputtering and rapid thermal annealing can be used alone or mixed with other process chambers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com