About: http://webisa.webdatacommons.org/330399896

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Subsequently, a mask material is applied to the portion where the opening is to be formed, and O2 ashing or the like is performed; thus, the liquid repellent agent applied on the area except the portion provided with the mask is removed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com