About: http://webisa.webdatacommons.org/331010352

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Semiconductor device structures, including gate electrode 14 and source and drain regions 16, are fabricated in and on the semiconductor substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com