About: http://webisa.webdatacommons.org/331233284

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	520Aug 24, 2004Nov 8, 2005Micron Technology, Inc.Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpiecesUS6969306Aug 19, 2004Nov 29, 2005Micron Technology, Inc.Apparatus for planarizing microelectronic workpiecesUS6974364Dec 31, 2002Dec 13, 2005Micron Technology, Inc.Methods and apparatuses for analyzing and controlling performance pa
http://www.w3.org/ns/prov#wasQuotedFrom	google.com