| http://www.w3.org/ns/prov#value | - Furthermore, buried insulating layers of depth greater, and significantly greater than 400 nm can be used when the exposed surface of the membrane layer, and in particular the exposed surface of the micro-mechanical component is supported by the support layer, since any tendency of the buried insulating layer to bow, and induce bowing stresses in the micro-mechanical component is counteracted by t
|
