| http://www.w3.org/ns/prov#value | - Further, the regions except for the region of the large crystal grain are microcrystalline regions where numerous nucleations occur or amorphous regions. [0010] As described above, if a temperature gradient in the lateral direction can be controlled (a heat flow is made to occur in the lateral direction) in the laser beam energy region in which the semiconductor film is completely melted, the grow
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